Matches in DBpedia 2014 for { ?s ?p Harvey C. Nathanson (born October 22, 1936) is an American electrical engineer who invented the first MEMS (micro-electro-mechanical systems) device of the type now found in consumer products ranging from cellular phones to digital projectors.MEMS devices, which are made using integrated circuit fabrication techniques, are composed of small moving mechanical elements that generally range from 1 to 100 micrometres (0.001 to 0.1 mm) in size.. }
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- Harvey_C._Nathanson comment "Harvey C. Nathanson (born October 22, 1936) is an American electrical engineer who invented the first MEMS (micro-electro-mechanical systems) device of the type now found in consumer products ranging from cellular phones to digital projectors.MEMS devices, which are made using integrated circuit fabrication techniques, are composed of small moving mechanical elements that generally range from 1 to 100 micrometres (0.001 to 0.1 mm) in size.".