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- 86600541 contributor B5341009.
- 86600541 created "[1986]".
- 86600541 date "1986".
- 86600541 date "[1986]".
- 86600541 dateCopyrighted "[1986]".
- 86600541 description "Bibliography: p. 11.".
- 86600541 extent "iii, 32 p. :".
- 86600541 isPartOf "NBS special publication ; 400-78".
- 86600541 isPartOf "Semiconductor measurement technology".
- 86600541 issued "1986".
- 86600541 issued "[1986]".
- 86600541 language "eng".
- 86600541 publisher "Gaithersburg, MD : U.S. Dept. of Commerce, National Bureau of Standards ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O.,".
- 86600541 subject "Ellipsometry Data processing.".
- 86600541 subject "FORTRAN (Computer program language)".
- 86600541 subject "QC100 .U57 no. 400-78 QC443".
- 86600541 title "Analytic analysis of ellipsometric errors / Deane Chandler-Horowitz.".
- 86600541 type "text".