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- 2008276642 alternative "ULSI process integration V".
- 2008276642 alternative "ULSI process integration five".
- 2008276642 contributor B11146393.
- 2008276642 contributor B11146394.
- 2008276642 contributor B11146395.
- 2008276642 created "c2007.".
- 2008276642 date "2007".
- 2008276642 date "c2007.".
- 2008276642 dateCopyrighted "c2007.".
- 2008276642 description "Includes bibliographical references and index.".
- 2008276642 extent "ix,495 p. :".
- 2008276642 identifier "9781566775724".
- 2008276642 identifier 2008276642.html.
- 2008276642 isPartOf "ECS transactions ; vol. 11, no. 6".
- 2008276642 issued "2007".
- 2008276642 issued "c2007.".
- 2008276642 language "eng".
- 2008276642 publisher "Pennington, NJ : Electrochemical Society,".
- 2008276642 subject "Integrated circuits Ultra large scale integration Congresses.".
- 2008276642 subject "TK7874.76 .I575 2007".
- 2008276642 title "ULSI process integration 5 / editors, C. Claeys ... [et al.].".
- 2008276642 title "ULSI process integration V".
- 2008276642 title "ULSI process integration five".
- 2008276642 type "text".