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- 91067547 contributor B6412805.
- 91067547 contributor B6412806.
- 91067547 created "c1992.".
- 91067547 date "1992".
- 91067547 date "c1992.".
- 91067547 dateCopyrighted "c1992.".
- 91067547 description "Includes bibliographical references and index.".
- 91067547 extent "ix, 419 p. :".
- 91067547 identifier "0819407259 (pbk.)".
- 91067547 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1594".
- 91067547 isPartOf "Proceedings of SPIE--the International Society for OPtical Engineering ; v. 1594.".
- 91067547 issued "1992".
- 91067547 issued "c1992.".
- 91067547 language "eng".
- 91067547 publisher "Bellingham, Wash. : SPIE,".
- 91067547 subject "621.381 20".
- 91067547 subject "Integrated circuits Design and construction Congresses.".
- 91067547 subject "Manufacturing processes Automation Congresses.".
- 91067547 subject "Microelectronics industry Production control Congresses.".
- 91067547 subject "Optical detectors Industrial applications Congresses.".
- 91067547 subject "TK7836 .P74 1992".
- 91067547 title "Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California / Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 91067547 type "text".