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- 141585446 alternateName "Annual SPIE Conference on Metrology, Inspection, and Process Control for Microlithography".
- 141585446 alternateName "Conference on Metrology, Inspection, and Process Control for Microlithography 10 1996 Santa Clara, Calif".
- 141585446 alternateName "SPIE Conference on Metrology, Inspection, and Process Control for Microlithography".
- 141585446 name "Conference on Metrology, Inspection, and Process Control for Microlithography".
- 141585446 sameAs 5242052-8.
- 141585446 type Organization.
- 141585446 seeAlso skos:Concept.