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- 141656985 alternateName "Symposium Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems 1992 San Francisco, Calif".
- 141656985 name "Symposium Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems".
- 141656985 sameAs 6020874-0.
- 141656985 type Organization.
- 141656985 seeAlso skos:Concept.