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- Microfabrication abstract "Microfabrication is the process of fabrication of miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods. Flat-panel displays and solar cells are also using similar techniques.Miniaturization of various devices presents challenges in many areas of science and engineering: physics, chemistry, materials science, computer science, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research. The major concepts and principles of microfabrication are microlithography, doping, thin films, etching, bonding, and polishing.".
- Microfabrication thumbnail Siliconchip_by_shapeshifter.png?width=300.
- Microfabrication wikiPageExternalLink ?p=1156.
- Microfabrication wikiPageExternalLink get-event.pl?--001964-000007-mhome--SME-.
- Microfabrication wikiPageID "3238520".
- Microfabrication wikiPageRevisionID "569635767".
- Microfabrication hasPhotoCollection Microfabrication.
- Microfabrication subject Category:Microtechnology.
- Microfabrication subject Category:Nanotechnology.
- Microfabrication subject Category:Semiconductor_device_fabrication.
- Microfabrication comment "Microfabrication is the process of fabrication of miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication".".
- Microfabrication label "Microfabrication".
- Microfabrication label "Microfabrication".
- Microfabrication label "تصنيع دقيق".
- Microfabrication sameAs Microfabrication.
- Microfabrication sameAs m.090h9j.
- Microfabrication sameAs Q175538.
- Microfabrication sameAs Q175538.
- Microfabrication wasDerivedFrom Microfabrication?oldid=569635767.
- Microfabrication depiction Siliconchip_by_shapeshifter.png.
- Microfabrication isPrimaryTopicOf Microfabrication.
