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- Multiple_patterning abstract "Multiple patterning is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of features. The resolution of a photoresist pattern begins to blur at around 45 nm half-pitch. For the semiconductor industry, therefore, double patterning was introduced for the 32 nm half-pitch node and below, mainly using state-of-the-art 193 nm immersion lithography tools. There are several types of double patterning. In combination, these may be used for multiple patterning.".
- Multiple_patterning thumbnail Dual-Tone_Photoresist.png?width=300.
- Multiple_patterning wikiPageExternalLink Double-development-offers-simpler-double-patterning.
- Multiple_patterning wikiPageExternalLink showArticle.jhtml?articleID=206903526&cid=RSSfeed_eetimes_newsRSS.
- Multiple_patterning wikiPageExternalLink CA604512.
- Multiple_patterning wikiPageExternalLink resists.html.
- Multiple_patterning wikiPageID "7908943".
- Multiple_patterning wikiPageRevisionID "602045148".
- Multiple_patterning hasPhotoCollection Multiple_patterning.
- Multiple_patterning subject Category:Lithography_(microfabrication).
- Multiple_patterning comment "Multiple patterning is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of features. The resolution of a photoresist pattern begins to blur at around 45 nm half-pitch.".
- Multiple_patterning label "Mehrfachstrukturierung".
- Multiple_patterning label "Multiple patterning".
- Multiple_patterning sameAs Mehrfachstrukturierung.
- Multiple_patterning sameAs m.026jnnq.
- Multiple_patterning sameAs Q1917460.
- Multiple_patterning sameAs Q1917460.
- Multiple_patterning wasDerivedFrom Multiple_patterning?oldid=602045148.
- Multiple_patterning depiction Dual-Tone_Photoresist.png.
- Multiple_patterning isPrimaryTopicOf Multiple_patterning.