Matches in DBpedia 2014 for { <http://dbpedia.org/resource/Rapid_thermal_processing> ?p ?o. }
Showing items 1 to 20 of
20
with 100 items per page.
- Rapid_thermal_processing abstract "Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1,200 °C or greater) on a timescale of several seconds or less. During cooling, however, wafer temperatures must be brought down slowly to prevent dislocations and wafer breakage due to thermal shock. Such rapid heating rates are often attained by high intensity lamps or lasers. These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition.".
- Rapid_thermal_processing wikiPageExternalLink Rapid_thermal_anneal.
- Rapid_thermal_processing wikiPageExternalLink www.ieee-rtp.org.
- Rapid_thermal_processing wikiPageExternalLink rtp_history.pdf.
- Rapid_thermal_processing wikiPageExternalLink CA338200.
- Rapid_thermal_processing wikiPageID "2162692".
- Rapid_thermal_processing wikiPageRevisionID "596726898".
- Rapid_thermal_processing hasPhotoCollection Rapid_thermal_processing.
- Rapid_thermal_processing subject Category:Semiconductor_device_fabrication.
- Rapid_thermal_processing comment "Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1,200 °C or greater) on a timescale of several seconds or less. During cooling, however, wafer temperatures must be brought down slowly to prevent dislocations and wafer breakage due to thermal shock. Such rapid heating rates are often attained by high intensity lamps or lasers.".
- Rapid_thermal_processing label "Rapid Thermal Processing".
- Rapid_thermal_processing label "Rapid thermal processing".
- Rapid_thermal_processing label "Recuit thermique rapide".
- Rapid_thermal_processing sameAs Rapid_Thermal_Processing.
- Rapid_thermal_processing sameAs Recuit_thermique_rapide.
- Rapid_thermal_processing sameAs m.06rh76.
- Rapid_thermal_processing sameAs Q2131545.
- Rapid_thermal_processing sameAs Q2131545.
- Rapid_thermal_processing wasDerivedFrom Rapid_thermal_processing?oldid=596726898.
- Rapid_thermal_processing isPrimaryTopicOf Rapid_thermal_processing.