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- catalog contributor b429653.
- catalog created "c1983.".
- catalog date "1983".
- catalog date "c1983.".
- catalog dateCopyrighted "c1983.".
- catalog description "Includes bibliographical references and index.".
- catalog description "P.1. Crystal growth and water preparation -- P.2. Epitaxy -- P.3. Dielectric and polysilicon film deposition -- P.4. Oxidation -- P.5. Diffusion -- P.6. Ion implantation -- P.7. Lithography -- P.8. Dry etching -- P.9. Metallization -- P.10. Process simulation -- P.11. VLSI process integration -- P.12. Diagnostic techniques -- P.13. Assembly techniques and packaging -- P.14. Yield and reliability.".
- catalog extent "xiv, 654 p. :".
- catalog hasFormat "VLSI technology.".
- catalog identifier "0070626863 :".
- catalog isFormatOf "VLSI technology.".
- catalog isPartOf "McGraw-Hill series in electrical engineering. Electronics and electronic circuits".
- catalog issued "1983".
- catalog issued "c1983.".
- catalog language "eng".
- catalog publisher "New York : McGraw-Hill,".
- catalog relation "VLSI technology.".
- catalog subject "Integrated circuits Very large scale integration.".
- catalog subject "TK7874 .V566 1983".
- catalog tableOfContents "P.1. Crystal growth and water preparation -- P.2. Epitaxy -- P.3. Dielectric and polysilicon film deposition -- P.4. Oxidation -- P.5. Diffusion -- P.6. Ion implantation -- P.7. Lithography -- P.8. Dry etching -- P.9. Metallization -- P.10. Process simulation -- P.11. VLSI process integration -- P.12. Diagnostic techniques -- P.13. Assembly techniques and packaging -- P.14. Yield and reliability.".
- catalog title "VLSI technology / edited by S.M. Sze.".
- catalog type "text".