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- catalog contributor b1428907.
- catalog created "1980.".
- catalog date "1980".
- catalog date "1980.".
- catalog dateCopyrighted "1980.".
- catalog description "Includes bibliographies and index.".
- catalog extent "vii, 481 p. ;".
- catalog identifier "0444853510".
- catalog isPartOf "Materials processing, theory and practices ; v. 1".
- catalog issued "1980".
- catalog issued "1980.".
- catalog language "eng".
- catalog publisher "Amsterdam ; New York : North-Holland Pub. Co. ; New York : sole distributor for the USA and Canada, Elsevier North-Holland,".
- catalog subject "Integrated circuits Large scale integration.".
- catalog subject "Lithography.".
- catalog title "Fine line lithography / edited by Roger Newman.".
- catalog type "text".