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- catalog contributor b3702229.
- catalog contributor b3702230.
- catalog contributor b3702231.
- catalog contributor b3702232.
- catalog contributor b3702233.
- catalog created "c1977.".
- catalog date "1977".
- catalog date "c1977.".
- catalog dateCopyrighted "c1977.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "viii, 176 p. :".
- catalog identifier "0892521279".
- catalog isPartOf "Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 100".
- catalog isPartOf "Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 100.".
- catalog issued "1977".
- catalog issued "c1977.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash. : SPIE,".
- catalog subject "621.381/74".
- catalog subject "Microlithography Congresses.".
- catalog subject "Semiconductors Congresses.".
- catalog subject "TK7871.85 .D493 1977".
- catalog subject "TK7871.85 .D493".
- catalog title "Developments in semiconductor microlithography II : [seminar], April 4-5, 1977, San Jose, California / James W. Giffin, Bruce Ruff, editors ; presented by the Society of Photo-optical Instrumentation Engineers and the Northern California Microphotomask/Masking Working Group, in cooperation with the International Society for Hybrid Microelectronics.".
- catalog type "text".