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- catalog contributor b10165546.
- catalog created "1996.".
- catalog date "1996".
- catalog date "1996.".
- catalog dateCopyrighted "1996.".
- catalog description "Includes bibliographical references (leaves 147-157).".
- catalog description "Thesis (Ph. D.)--Harvard University, 1997.".
- catalog extent "161 leaves :".
- catalog issued "1996".
- catalog issued "1996.".
- catalog language "eng".
- catalog subject "Atomic beams.".
- catalog subject "Lithography.".
- catalog title "Resist based neutral atom lithography / a thesis presented by Karl Kimon Berggren.".
- catalog type "text".