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- catalog alternative "Fundamentals of semiconductor processing technologies.".
- catalog contributor b10670689.
- catalog created "c1995.".
- catalog date "1995".
- catalog date "c1995.".
- catalog dateCopyrighted "c1995.".
- catalog description "Includes bibliographical references and index.".
- catalog description "Semiconductor crystals and crystallographic orientations -- Thermal oxidation and nitridation -- Thin film deposition -- Lithography -- Contamination control and etch -- Ion implantation Diffusion -- Contact and interconnect technology.".
- catalog extent "xii, 599 p. :".
- catalog identifier "0792395344 (acid-free paper)".
- catalog issued "1995".
- catalog issued "c1995.".
- catalog language "eng".
- catalog publisher "Boston : Kluwer Academic Publishers,".
- catalog subject "621.3815/2 20".
- catalog subject "Manufacturing processes.".
- catalog subject "Semiconductors Design and construction.".
- catalog subject "TK7871.85 .E45 1995".
- catalog tableOfContents "Semiconductor crystals and crystallographic orientations -- Thermal oxidation and nitridation -- Thin film deposition -- Lithography -- Contamination control and etch -- Ion implantation Diffusion -- Contact and interconnect technology.".
- catalog title "Fundamentals of semiconductor processing technologies.".
- catalog title "Fundamentals of semiconductor processing technology / by Badih El-Kareh ; graphics and layout, Richard J. Bombard.".
- catalog type "text".