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- catalog contributor b10947566.
- catalog contributor b10947567.
- catalog contributor b10947568.
- catalog contributor b10947569.
- catalog created "1995.".
- catalog date "1995".
- catalog date "1995.".
- catalog dateCopyrighted "1995.".
- catalog description "Includes bibliographical references.".
- catalog extent "iv, 51 p. :".
- catalog isPartOf "NIST special publication ; 400-98".
- catalog isPartOf "Semiconductor measurement technology".
- catalog issued "1995".
- catalog issued "1995.".
- catalog language "eng".
- catalog publisher "Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,".
- catalog spatial "United States.".
- catalog subject "Semiconductor industry United States.".
- catalog subject "Semiconductors Characterization.".
- catalog subject "Semiconductors Testing Optical methods.".
- catalog title "Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry [microform] / W. Murray Bullis, S. Perkowitz, D.G. Seiler.".
- catalog type "text".