Matches in Harvard for { <http://id.lib.harvard.edu/aleph/009262433/catalog> ?p ?o. }
Showing items 1 to 22 of
22
with 100 items per page.
- catalog contributor b13066108.
- catalog contributor b13066109.
- catalog contributor b13066110.
- catalog created "c2003.".
- catalog date "2003".
- catalog date "c2003.".
- catalog dateCopyrighted "c2003.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 348 p. :".
- catalog identifier "1558997040".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 767.".
- catalog isPartOf "Materials Research Society symposium proceedings ; 767".
- catalog issued "2003".
- catalog issued "c2003.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog subject "Grinding and polishing Congresses.".
- catalog subject "Metals Pickling Congresses.".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "Semiconductors Surfaces Congresses.".
- catalog title "Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors: Duane S. Boning ... [et al.].".
- catalog type "text".