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- 00031885 contributor B22147.
- 00031885 created "c2000.".
- 00031885 date "2000".
- 00031885 date "c2000.".
- 00031885 dateCopyrighted "c2000.".
- 00031885 description "Includes bibliographical references and index.".
- 00031885 extent "xiii, 340 p. :".
- 00031885 identifier "1558994920".
- 00031885 identifier 00031885-d.html.
- 00031885 isPartOf "Materials Research Society symposia proceedings ; v. 584.".
- 00031885 isPartOf "Materials Research Society symposium proceedings ; 584".
- 00031885 issued "2000".
- 00031885 issued "c2000.".
- 00031885 language "eng".
- 00031885 publisher "Warrendale, Pa. : Materials Research Society,".
- 00031885 subject "621.3815 21".
- 00031885 subject "Integrated circuits Design and construction Congresses.".
- 00031885 subject "Integrated circuits Materials Congresses.".
- 00031885 subject "Microlithography Congresses.".
- 00031885 subject "Molecular electronics Congresses.".
- 00031885 subject "Nanotechnology Congresses.".
- 00031885 subject "TK7874 .M3439 2000".
- 00031885 title "Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. / editors, Lhadi Merhari ... [et al.].".
- 00031885 type "text".