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- 00051022 contributor B44534.
- 00051022 created "2001.".
- 00051022 date "2001".
- 00051022 date "2001.".
- 00051022 dateCopyrighted "2001.".
- 00051022 description "Includes bibliographical references and index.".
- 00051022 extent "xiv, 603 p. :".
- 00051022 identifier "0195136055".
- 00051022 identifier 00051022-d.html.
- 00051022 identifier 00051022-t.html.
- 00051022 isPartOf "The Oxford series in electrical and computer engineering".
- 00051022 issued "2001".
- 00051022 issued "2001.".
- 00051022 language "eng".
- 00051022 publisher "New York : Oxford University Press,".
- 00051022 subject "621.3815/2 21".
- 00051022 subject "Semiconductors Design and construction.".
- 00051022 subject "TK7871.85 .C25 2001".
- 00051022 title "The science and engineering of microelectronic fabrication / Stephen A. Campbell.".
- 00051022 type "text".