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- 00057953 contributor B52396.
- 00057953 created "c2001.".
- 00057953 date "2001".
- 00057953 date "c2001.".
- 00057953 dateCopyrighted "c2001.".
- 00057953 description "Includes bibliographical references and index.".
- 00057953 extent "338 p. :".
- 00057953 identifier "0849309166 (alk. paper)".
- 00057953 identifier 00057953-d.html.
- 00057953 isPartOf "Nano- and microscience, engineering, technology, and medicine series".
- 00057953 issued "2001".
- 00057953 issued "c2001.".
- 00057953 language "eng".
- 00057953 publisher "Boca Raton : CRC Press,".
- 00057953 subject "621.381 21".
- 00057953 subject "Microelectromechanical systems.".
- 00057953 subject "TK7875 .L96 2000".
- 00057953 title "Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski.".
- 00057953 type "text".