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- 00061209 contributor B56045.
- 00061209 created "c2000.".
- 00061209 date "2000".
- 00061209 date "c2000.".
- 00061209 dateCopyrighted "c2000.".
- 00061209 description "Includes bibliographical references and index.".
- 00061209 extent "xi, 520 p. :".
- 00061209 identifier "0819437166".
- 00061209 issued "2000".
- 00061209 issued "c2000.".
- 00061209 language "eng".
- 00061209 publisher "Bellingham, Wash. : SPIE Optical Engineering Press,".
- 00061209 subject "621.381 21".
- 00061209 subject "Microelectromechanical systems.".
- 00061209 subject "Optoelectronic devices.".
- 00061209 subject "TK7875 .R35 2000".
- 00061209 title "MEMS and MOEMS technology and applications / P. Rai-Choudhury, editor.".
- 00061209 type "text".