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- 00103972 contributor B69907.
- 00103972 contributor B69908.
- 00103972 contributor B69909.
- 00103972 created "c2000.".
- 00103972 date "2000".
- 00103972 date "c2000.".
- 00103972 dateCopyrighted "c2000.".
- 00103972 description "Includes bibliographical references and index.".
- 00103972 extent "xxvi, 829 p. :".
- 00103972 identifier "0780364627".
- 00103972 issued "2000".
- 00103972 issued "c2000.".
- 00103972 language "eng".
- 00103972 publisher "Piscataway, NJ, USA : Available from IEEE Operations Center,".
- 00103972 subject "621.3815/2 21".
- 00103972 subject "Ion implantation Congresses.".
- 00103972 subject "Semiconductor doping Congresses.".
- 00103972 subject "Semiconductors Congresses.".
- 00103972 subject "TK7871.85 .I57623 2000".
- 00103972 title "Ion implantation technology--2000 : 2000 International Conference on Ion Implantation Technology : proceedings, Alpbach, Austria, 17-22 September 2000 / editors, Heiner Ryssel ... [et al.].".
- 00103972 type "text".