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- 00111547 contributor B75496.
- 00111547 contributor B75497.
- 00111547 created "c2000.".
- 00111547 date "2000".
- 00111547 date "c2000.".
- 00111547 dateCopyrighted "c2000.".
- 00111547 description "Includes bibliographical references and index.".
- 00111547 description "System requirements for Macintosh computer disk: Macintosh with 68020 or greater processor; hard disk with 4 MB free; 2 MB RAM; OS 7 or later; Acrobat Reader.".
- 00111547 description "System requirements for Unix computer disk: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.".
- 00111547 description "System requirements for accompanying computer disc: IBM PC or compatible; Windows 95 or higher; Acrobat Reader, hard disk with at least 4 MB free; at least 4 MB RAM.".
- 00111547 extent "2 v. :".
- 00111547 identifier "156396967X".
- 00111547 identifier 00111547-d.html.
- 00111547 isPartOf "AIP Conference Proceedings ; vol. 550".
- 00111547 isPartOf "AIP conference proceedings ; no. 550.".
- 00111547 issued "2000".
- 00111547 issued "c2000.".
- 00111547 language "eng".
- 00111547 publisher "Melville, N.Y. : American Institute of Physics,".
- 00111547 requires "System requirements for Macintosh computer disk: Macintosh with 68020 or greater processor; hard disk with 4 MB free; 2 MB RAM; OS 7 or later; Acrobat Reader.".
- 00111547 requires "System requirements for Unix computer disk: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.".
- 00111547 requires "System requirements for accompanying computer disc: IBM PC or compatible; Windows 95 or higher; Acrobat Reader, hard disk with at least 4 MB free; at least 4 MB RAM.".
- 00111547 subject "621.39/5 22".
- 00111547 subject "Integrated circuits Ultra large scale integration Congresses Software.".
- 00111547 subject "Integrated circuits Ultra large scale integration Congresses.".
- 00111547 subject "TK7874.76 .C495 2000".
- 00111547 title "Characterization and metrology for ULSI technology 2000: International Conference,Gaithersburg, Maryland, 26-29, June 2000 / editors David G. Seiler ... [et al.].".
- 00111547 type "text".