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- 00266407 contributor B82107.
- 00266407 contributor B82108.
- 00266407 created "c1999.".
- 00266407 date "1999".
- 00266407 date "c1999.".
- 00266407 dateCopyrighted "c1999.".
- 00266407 description "Includes bibliographic references and author index.".
- 00266407 extent "viii, 344 p. :".
- 00266407 identifier "0819432237".
- 00266407 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 3743".
- 00266407 isPartOf "Proceedings EurOpt series".
- 00266407 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3743.".
- 00266407 issued "1999".
- 00266407 issued "c1999.".
- 00266407 language "eng".
- 00266407 publisher "Bellingham, Wash., USA : SPIE,".
- 00266407 subject "621.3815 21".
- 00266407 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 00266407 subject "Manufacturing processes Congresses.".
- 00266407 subject "Microelectronics Materials Congresses.".
- 00266407 subject "Semiconductors Design and construction Congresses.".
- 00266407 subject "TK7874 .I4633 1999".
- 00266407 title "In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing : 19-21 May, 1999, Edinburgh, Scotland / Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers.".
- 00266407 type "text".