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- 00702718 contributor B287853.
- 00702718 contributor B287854.
- 00702718 created "c1999.".
- 00702718 date "1999".
- 00702718 date "c1999.".
- 00702718 dateCopyrighted "c1999.".
- 00702718 description "Includes bibliographical references and index.".
- 00702718 extent "vii, 394 p. :".
- 00702718 identifier "0819434930".
- 00702718 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3892.".
- 00702718 isPartOf "SPIE proceedings series ; v. 3892".
- 00702718 issued "1999".
- 00702718 issued "c1999.".
- 00702718 language "eng".
- 00702718 publisher "Bellingham, Wash., USA : SPIE,".
- 00702718 subject "621.381 21".
- 00702718 subject "Microelectromechanical systems Congresses.".
- 00702718 subject "Photolithography Congresses.".
- 00702718 subject "Photomechanical processes Congresses.".
- 00702718 subject "Photon detectors Design and construction Congresses.".
- 00702718 subject "TK7875 .D48 1999".
- 00702718 title "Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.].".
- 00702718 type "text".