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- 2001093106 alternative "Advanced thermal processing of semiconductors".
- 2001093106 contributor B8971123.
- 2001093106 contributor B8971124.
- 2001093106 contributor B8971125.
- 2001093106 created "c2001.".
- 2001093106 date "2001".
- 2001093106 date "c2001.".
- 2001093106 dateCopyrighted "c2001.".
- 2001093106 description "Includes bibliographical references.".
- 2001093106 extent "326 p. :".
- 2001093106 issued "2001".
- 2001093106 issued "c2001.".
- 2001093106 language "eng".
- 2001093106 publisher "[Piscataway, New Jersey : IEEE] : RTP Conference,".
- 2001093106 subject "Rapid thermal processing Congresses.".
- 2001093106 subject "Semiconductor doping Congresses.".
- 2001093106 subject "Semiconductors Defects. Congresses.".
- 2001093106 subject "Semiconductors Heat treatment. Congresses.".
- 2001093106 subject "TK7871.85 .I5743 2001".
- 2001093106 title "Advanced thermal processing of semiconductors".
- 2001093106 title "RTP 2001 : 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / D.P. DeWitt ... [et al.], editors.".
- 2001093106 type "text".