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- 2001267692 alternative "Smart electronics and MEMS".
- 2001267692 contributor B8983486.
- 2001267692 contributor B8983487.
- 2001267692 created "c2000.".
- 2001267692 date "2000".
- 2001267692 date "c2000.".
- 2001267692 dateCopyrighted "c2000.".
- 2001267692 description "Includes bibliographic references and index.".
- 2001267692 extent "viii, 390 p. :".
- 2001267692 identifier "0819436089".
- 2001267692 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3990.".
- 2001267692 isPartOf "SPIE proceedings series ; v. 3990".
- 2001267692 issued "2000".
- 2001267692 issued "c2000.".
- 2001267692 language "eng".
- 2001267692 publisher "Bellingham, Washington : SPIE,".
- 2001267692 subject "621.381 21".
- 2001267692 subject "Actuators Congresses.".
- 2001267692 subject "Microelectromechanical systems Congresses.".
- 2001267692 subject "Microelectronics Materials Congresses.".
- 2001267692 subject "Smart materials Congresses.".
- 2001267692 subject "TA418.9.S62 S52995 2000".
- 2001267692 title "Smart electronics and MEMS".
- 2001267692 title "Smart structures and materials 2000. Smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA / Vijay K. Varadan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by SEM--Society for Experimental Mechanics ... [et al.] ; cooperating organizations, Air Force Research Laboratory, the Ceramic Society of Japan, [and] Intelligent Materials Forum (Japan).".
- 2001267692 type "text".