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- 2001394696 alternative "Development of ultra precision cleaning technologies".
- 2001394696 contributor B9108417.
- 2001394696 created "2000.".
- 2001394696 date "2000".
- 2001394696 date "2000.".
- 2001394696 dateCopyrighted "2000.".
- 2001394696 description "Includes bibliographical references.".
- 2001394696 extent "iv, 247 p. :".
- 2001394696 identifier "488231083X".
- 2001394696 isPartOf "880-04 CMC books fukyūban shirīzu".
- 2001394696 issued "2000".
- 2001394696 issued "2000.".
- 2001394696 language "In Japanese.".
- 2001394696 language "jpn".
- 2001394696 publisher "Tōkyō : Shī Emu Shī,".
- 2001394696 subject "Cleaning.".
- 2001394696 subject "TX324 .C56 2000".
- 2001394696 title "880-01 Chō seimitsu senjō gijutsu no kaihatsu = Development of ultra precision cleaning technologies / kanshū Tsunoda Teruo.".
- 2001394696 title "Development of ultra precision cleaning technologies".
- 2001394696 type "text".