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- 2002072962 contributor B9243400.
- 2002072962 created "c2002.".
- 2002072962 date "2002".
- 2002072962 date "c2002.".
- 2002072962 dateCopyrighted "c2002.".
- 2002072962 description "Includes bibliographical references and index.".
- 2002072962 extent "xiii, 363 p. :".
- 2002072962 identifier "1402005245 (alk. paper)".
- 2002072962 identifier 2002072962-d.html.
- 2002072962 identifier 2002072962-t.html.
- 2002072962 isPartOf "NATO science series. Series II, Mathematics, physics, and chemistry ; v. 55".
- 2002072962 issued "2002".
- 2002072962 issued "c2002.".
- 2002072962 language "eng".
- 2002072962 publisher "Dordrecht ; Boston : Kluwer Academic Publishers,".
- 2002072962 subject "621.3815/2 21".
- 2002072962 subject "Nanotechnology Congresses.".
- 2002072962 subject "TA418.9.T45 C47 2002".
- 2002072962 subject "Thin films Congresses.".
- 2002072962 title "Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau.".
- 2002072962 type "text".