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- 2002103603 contributor B9251379.
- 2002103603 contributor B9251380.
- 2002103603 contributor B9251381.
- 2002103603 created "c2002.".
- 2002103603 date "2002".
- 2002103603 date "c2002.".
- 2002103603 dateCopyrighted "c2002.".
- 2002103603 description "Includes bibliographical references and index.".
- 2002103603 extent "2 v. (xx, 1074 p.) :".
- 2002103603 identifier "1566773687 (v. 1)".
- 2002103603 identifier "1566773733 (v. 2)".
- 2002103603 identifier "1566773741 (set)".
- 2002103603 isPartOf "Proceedings (Electrochemical Society) ; v. 2002-2.".
- 2002103603 isPartOf "Proceedings ; v. 2002-2".
- 2002103603 issued "2002".
- 2002103603 issued "c2002.".
- 2002103603 language "eng".
- 2002103603 publisher "Pennington, N.J. : Electrochemical Society,".
- 2002103603 subject "621.3815/2 22".
- 2002103603 subject "Semiconductors Congresses.".
- 2002103603 subject "Silicon Congresses.".
- 2002103603 subject "TK7871.85 .I5842 2002".
- 2002103603 title "Semiconductor silicon 2002 : proceedings of the Ninth International Symposium on Silicon Materials Science and Technology / editors, H.R. Huff, L. Fabry, S. Kishino.".
- 2002103603 type "text".