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- 2002108247 contributor B9254731.
- 2002108247 contributor B9254732.
- 2002108247 contributor B9254733.
- 2002108247 created "c2002.".
- 2002108247 date "2002".
- 2002108247 date "c2002.".
- 2002108247 dateCopyrighted "c2002.".
- 2002108247 description "Includes bibliographical references and indexes.".
- 2002108247 extent "vii, 274 p. :".
- 2002108247 identifier "1566773296".
- 2002108247 identifier 2002108247.html.
- 2002108247 isPartOf "Proceedings (Electrochemical Society) ; v. 2002-1.".
- 2002108247 isPartOf "Proceedings ; v. 2002-1.".
- 2002108247 issued "2002".
- 2002108247 issued "c2002.".
- 2002108247 language "eng".
- 2002108247 publisher "Pennington, NJ : Electrochemical Society, Inc.,".
- 2002108247 subject "621.381 22".
- 2002108247 subject "Chemical mechanical planarization Congresses.".
- 2002108247 subject "Grinding and polishing Congresses.".
- 2002108247 subject "Integrated circuits Materials Congresses.".
- 2002108247 subject "Metals Pickling Congresses.".
- 2002108247 subject "Microelectronics Materials Congresses.".
- 2002108247 subject "TK7871 .I586 2002".
- 2002108247 title "Chemical mechanical planarization V : proceedings of the International Symposium / editors, S. Seal ... [et al.]".
- 2002108247 type "text".