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- 2002108420 contributor B9254852.
- 2002108420 contributor B9254853.
- 2002108420 created "c2002.".
- 2002108420 date "2002".
- 2002108420 date "c2002.".
- 2002108420 dateCopyrighted "c2002.".
- 2002108420 description "Includes bibliographical references and index.".
- 2002108420 extent "211 p. :".
- 2002108420 hasFormat "Also available via the World Wide Web.".
- 2002108420 identifier "0780375955".
- 2002108420 isFormatOf "Also available via the World Wide Web.".
- 2002108420 issued "2002".
- 2002108420 issued "c2002.".
- 2002108420 language "eng".
- 2002108420 publisher "Piscataway, N.J. : IEEE,".
- 2002108420 relation "Also available via the World Wide Web.".
- 2002108420 subject "621.381 22".
- 2002108420 subject "Microelectromechanical systems Congresses.".
- 2002108420 subject "Optical MEMS Congresses.".
- 2002108420 subject "Optoelectronic devices Congresses.".
- 2002108420 subject "TK7875 .I334 2002".
- 2002108420 title "2002 IEEE/LEOS International Conference on Optical MEMs : conference digest : 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland / sponsored by IEEE Lasers and Electro-Optics Society.".
- 2002108420 type "text".