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- 2002265591 contributor B9271434.
- 2002265591 contributor B9271435.
- 2002265591 created "c2001.".
- 2002265591 date "2001".
- 2002265591 date "c2001.".
- 2002265591 dateCopyrighted "c2001.".
- 2002265591 description "Includes bibliographical references and index.".
- 2002265591 extent "xxvii, 296 p. :".
- 2002265591 identifier "0819442860".
- 2002265591 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4558.".
- 2002265591 isPartOf "SPIE proceedings series ; v. 4558".
- 2002265591 issued "2001".
- 2002265591 issued "c2001.".
- 2002265591 language "eng".
- 2002265591 publisher "Bellingham, Wash. : SPIE,".
- 2002265591 subject "621.381 22".
- 2002265591 subject "Microelectromechanical systems Reliability Congresses.".
- 2002265591 subject "Microelectromechanical systems Testing Congresses.".
- 2002265591 subject "TK7875 .R45 2001".
- 2002265591 title "Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA / Rajeshuni Ramesham, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.].".
- 2002265591 type "text".