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- 2002277677 contributor B9275097.
- 2002277677 contributor B9275098.
- 2002277677 created "c2001.".
- 2002277677 date "2001".
- 2002277677 date "c2001.".
- 2002277677 dateCopyrighted "c2001.".
- 2002277677 description "Includes bibliographic references and author index.".
- 2002277677 extent "xxv, 350 p. :".
- 2002277677 identifier "0819442895 (pbk.)".
- 2002277677 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4561.".
- 2002277677 isPartOf "SPIE proceedings series ; v. 4561".
- 2002277677 issued "2001".
- 2002277677 issued "c2001.".
- 2002277677 language "eng".
- 2002277677 publisher "Bellingham, Wash., USA : SPIE,".
- 2002277677 subject "621.381 21".
- 2002277677 subject "Microelectromechanical systems Congresses.".
- 2002277677 subject "Micromechanics Congresses.".
- 2002277677 subject "Miniature electronic equipment Congresses.".
- 2002277677 subject "Optical scanners Congresses.".
- 2002277677 subject "TK7874 .M53253 2001".
- 2002277677 title "MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA / M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.].".
- 2002277677 type "text".