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- 2002277683 contributor B9275107.
- 2002277683 contributor B9275108.
- 2002277683 created "c2001.".
- 2002277683 date "2001".
- 2002277683 date "c2001.".
- 2002277683 dateCopyrighted "c2001.".
- 2002277683 description "Includes bibliographic references and author index.".
- 2002277683 extent "ix, 326 p. :".
- 2002277683 identifier "0819442968 (pbk.)".
- 2002277683 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4568.".
- 2002277683 isPartOf "SPIE proceedings series ; v. 4568".
- 2002277683 issued "2001".
- 2002277683 issued "c2001.".
- 2002277683 language "eng".
- 2002277683 publisher "Bellingham, Wash., USA : SPIE,".
- 2002277683 subject "629.8/92 21".
- 2002277683 subject "Microelectromechanical systems Congresses.".
- 2002277683 subject "Microfabrication Congresses.".
- 2002277683 subject "Microrobots Congresses.".
- 2002277683 subject "Robotics Congresses.".
- 2002277683 subject "TJ210.3 .M512 2001".
- 2002277683 title "Microrobotics and microassembly III : 29-30 October, 2001, Newton [Massachusetts] USA / Bradley J. Nelson, Jean-Marc Breguet, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2002277683 type "text".