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- 2002278092 contributor B9275643.
- 2002278092 contributor B9275644.
- 2002278092 created "c2000.".
- 2002278092 date "2000".
- 2002278092 date "c2000.".
- 2002278092 dateCopyrighted "c2000.".
- 2002278092 description "Includes bibliographical references and index.".
- 2002278092 extent "184 p. :".
- 2002278092 identifier "0819438596".
- 2002278092 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4194.".
- 2002278092 isPartOf "SPIE proceedings series ; v. 4194".
- 2002278092 issued "2000".
- 2002278092 issued "c2000.".
- 2002278092 language "eng".
- 2002278092 publisher "Bellingham, Wash. : International Society for Optical Engineering,".
- 2002278092 subject "Microelectromechanical systems Congresses.".
- 2002278092 subject "Microfabrication Congresses.".
- 2002278092 subject "Microrobots Congresses.".
- 2002278092 subject "Robotics Congresses.".
- 2002278092 subject "TJ210.3 .M5118 2000".
- 2002278092 title "Microrobotics and microassembly II, 5-6 November 2000 / Bradley J. Nelson, Jean-Marc Breguet, chairs/editors.".
- 2002278092 type "text".