Matches in Library of Congress for { <http://lccn.loc.gov/2002280119> ?p ?o. }
Showing items 1 to 23 of
23
with 100 items per page.
- 2002280119 contributor B9278172.
- 2002280119 contributor B9278173.
- 2002280119 created "c2001.".
- 2002280119 date "2001".
- 2002280119 date "c2001.".
- 2002280119 dateCopyrighted "c2001.".
- 2002280119 description "Includes bibliographical references and index.".
- 2002280119 extent "xi, 538 p. :".
- 2002280119 identifier "0819443220".
- 2002280119 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4592.".
- 2002280119 isPartOf "SPIE proceedings series ; v. 4592".
- 2002280119 issued "2001".
- 2002280119 issued "c2001.".
- 2002280119 language "eng".
- 2002280119 publisher "Bellingham, Wash. : SPIE,".
- 2002280119 subject "621.381 22".
- 2002280119 subject "Microelectromechanical systems Congresses.".
- 2002280119 subject "Photolithography Congresses.".
- 2002280119 subject "Photomechanical processes Congresses.".
- 2002280119 subject "Photon detectors Design and construction Congresses.".
- 2002280119 subject "TK7875 .D48 2001".
- 2002280119 title "Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia / Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section.".
- 2002280119 type "text".