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- 2002487178 contributor B9435068.
- 2002487178 created "[c2001].".
- 2002487178 date "2001".
- 2002487178 date "[c2001].".
- 2002487178 dateCopyrighted "[c2001].".
- 2002487178 description "Includes bibliographical references and index.".
- 2002487178 extent "292 p. :".
- 2002487178 identifier "3000063951".
- 2002487178 issued "2001".
- 2002487178 issued "[c2001].".
- 2002487178 language "eng".
- 2002487178 publisher "Gottingen : Lambda Physik,".
- 2002487178 subject "621.36/63 22".
- 2002487178 subject "Excimer lasers.".
- 2002487178 subject "TA1695 .E9347 2001".
- 2002487178 title "Excimer laser technology : laser sources, optics, systems and applications / Lambda Physik ; [editor, Dirk Basting].".
- 2002487178 type "text".