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- 2002510017 contributor B9459083.
- 2002510017 contributor B9459084.
- 2002510017 created "c2001.".
- 2002510017 date "2001".
- 2002510017 date "c2001.".
- 2002510017 dateCopyrighted "c2001.".
- 2002510017 description "Includes bibliographic references and index.".
- 2002510017 extent "v, 158 p. :".
- 2002510017 identifier "0819441066".
- 2002510017 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4405.".
- 2002510017 isPartOf "SPIE proceedings series, 0277-786X ; v. 4405".
- 2002510017 issued "2001".
- 2002510017 issued "c2001.".
- 2002510017 language "eng".
- 2002510017 publisher "Bellingham, Washington : SPIE,".
- 2002510017 subject "621.381 21".
- 2002510017 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 2002510017 subject "Microelectronics Materials Congresses.".
- 2002510017 subject "Microelectronics industry Production control Congresses.".
- 2002510017 subject "TK7836 .P723 2001".
- 2002510017 title "Process and equipment control in microelectronic manufacturing II : 30-31 May 2001, Edinburgh, UK / Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK).".
- 2002510017 type "text".