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- 2002510518 contributor B9459702.
- 2002510518 contributor B9459703.
- 2002510518 created "c2002.".
- 2002510518 date "2002".
- 2002510518 date "c2002.".
- 2002510518 dateCopyrighted "c2002.".
- 2002510518 description "Includes bibliographical references and index.".
- 2002510518 extent "xvii, 832 p. :".
- 2002510518 identifier "0819445185".
- 2002510518 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4755.".
- 2002510518 isPartOf "SPIE proceedings series ; v. 4755".
- 2002510518 issued "2002".
- 2002510518 issued "c2002.".
- 2002510518 language "eng".
- 2002510518 publisher "Bellingham, Wash. : SPIE,".
- 2002510518 subject "Microelectromechanical systems Congresses.".
- 2002510518 subject "Microelectronic packaging Congresses.".
- 2002510518 subject "Micromachining Congresses.".
- 2002510518 subject "Optoelectronic devices Congresses.".
- 2002510518 subject "TK7875 .D47598 2002".
- 2002510518 title "Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France / Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.].".
- 2002510518 type "text".