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- 2003015993 contributor B9515066.
- 2003015993 created "2003.".
- 2003015993 date "2003".
- 2003015993 date "2003.".
- 2003015993 dateCopyrighted "2003.".
- 2003015993 extent "vi, 295 p. :".
- 2003015993 identifier "1903996473".
- 2003015993 identifier 2003015993-d.html.
- 2003015993 identifier 2003015993.html.
- 2003015993 issued "2003".
- 2003015993 issued "2003.".
- 2003015993 language "eng".
- 2003015993 publisher "London ; Sterling, VA : Kogan Page Science,".
- 2003015993 subject "621.381 22".
- 2003015993 subject "Microelectromechanical systems.".
- 2003015993 subject "TK7875 .M58 2003".
- 2003015993 title "Microsystems technology : fabrication, test & reliability / edited by Jumana Boussey.".
- 2003015993 type "text".