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- 2003049661 contributor B9540110.
- 2003049661 contributor B9540111.
- 2003049661 created "2003.".
- 2003049661 date "2003".
- 2003049661 date "2003.".
- 2003049661 dateCopyrighted "2003.".
- 2003049661 description "Includes bibliographical references and index.".
- 2003049661 extent "xii, 666 p. :".
- 2003049661 identifier "0471457728 (cloth)".
- 2003049661 identifier es0704_3154.html.
- 2003049661 identifier 2003049661.html.
- 2003049661 identifier 2003049661.html.
- 2003049661 identifier 2003049661.html.
- 2003049661 issued "2003".
- 2003049661 issued "2003.".
- 2003049661 language "eng".
- 2003049661 publisher "Hoboken, NJ : John Wiley,".
- 2003049661 subject "621.39/5 21".
- 2003049661 subject "Electron microscopy.".
- 2003049661 subject "Integrated circuits Ultra large scale integration Atlases.".
- 2003049661 subject "TK7874.76 .T86 2003".
- 2003049661 title "ULSI semiconductor technology atlas / Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu.".
- 2003049661 type "text".