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- 2003266773 alternative "MEMS 2002".
- 2003266773 alternative "Micro electro mechanical systems".
- 2003266773 contributor B9579566.
- 2003266773 contributor B9579567.
- 2003266773 created "c2002.".
- 2003266773 date "2002".
- 2003266773 date "c2002.".
- 2003266773 dateCopyrighted "c2002.".
- 2003266773 description "Includes bibliographical references and author index.".
- 2003266773 extent "xliii, 736 p. :".
- 2003266773 identifier "0780371852".
- 2003266773 identifier "0780371860 (microfiche ed.)".
- 2003266773 identifier opac?punumber=7726.
- 2003266773 issued "2002".
- 2003266773 issued "c2002.".
- 2003266773 language "eng".
- 2003266773 publisher "Piscataway, N.J. : IEEE,".
- 2003266773 subject "621.381 22".
- 2003266773 subject "Microelectromechanical systems Congresses.".
- 2003266773 subject "TK7875 .I33 2002".
- 2003266773 title "MEMS 2002 : the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Las Vegas, Nevada, USA, January 20-24, 2002 / sponsored by IEEE and the Robotics and Automation Society.".
- 2003266773 title "MEMS 2002".
- 2003266773 title "Micro electro mechanical systems".
- 2003266773 type "text".