Matches in Library of Congress for { <http://lccn.loc.gov/2003268030> ?p ?o. }
Showing items 1 to 25 of
25
with 100 items per page.
- 2003268030 alternative "Microelectromechanical systems design, fabrication, characterization, and packaging".
- 2003268030 contributor B9581159.
- 2003268030 contributor B9581160.
- 2003268030 created "c2001.".
- 2003268030 date "2001".
- 2003268030 date "c2001.".
- 2003268030 dateCopyrighted "c2001.".
- 2003268030 description "Includes bibliographical references and index.".
- 2003268030 extent "ix, 442 p. :".
- 2003268030 identifier "0819441082".
- 2003268030 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4407.".
- 2003268030 isPartOf "SPIE proceedings series ; v. 4407".
- 2003268030 issued "2001".
- 2003268030 issued "c2001.".
- 2003268030 language "eng".
- 2003268030 publisher "Bellingham, Wash., USA : SPIE,".
- 2003268030 subject "621 21".
- 2003268030 subject "Mechatronics Congresses.".
- 2003268030 subject "Microelectromechanical systems Design and construction Congresses.".
- 2003268030 subject "Microelectronic packaging Congresses.".
- 2003268030 subject "Microfabrication Congresses.".
- 2003268030 subject "TK7875 .M4535 2001".
- 2003268030 title "MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK / Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK).".
- 2003268030 title "Microelectromechanical systems design, fabrication, characterization, and packaging".
- 2003268030 type "text".