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- 2003271118 contributor B9585038.
- 2003271118 contributor B9585039.
- 2003271118 created "c2003.".
- 2003271118 date "2003".
- 2003271118 date "c2003.".
- 2003271118 dateCopyrighted "c2003.".
- 2003271118 description "Includes bibliographical references and index.".
- 2003271118 extent "xlii, 306 p. :".
- 2003271118 identifier "0819447854".
- 2003271118 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4985.".
- 2003271118 isPartOf "SPIE proceedings series, 0277-786X ; v. 4985".
- 2003271118 issued "2003".
- 2003271118 issued "c2003.".
- 2003271118 language "eng".
- 2003271118 publisher "Bellingham, Wash., USA : SPIE,".
- 2003271118 subject "621.36/7 22".
- 2003271118 subject "Imaging systems Congresses.".
- 2003271118 subject "Microelectromechanical systems Congresses.".
- 2003271118 subject "Optics, Adaptive Congresses.".
- 2003271118 subject "Scanning systems Congresses.".
- 2003271118 subject "TK7875 .M64 2003".
- 2003271118 title "MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA / Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).".
- 2003271118 type "text".