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- 2003544707 contributor B9778054.
- 2003544707 contributor B9778055.
- 2003544707 created "c2003.".
- 2003544707 date "2003".
- 2003544707 date "c2003.".
- 2003544707 dateCopyrighted "c2003.".
- 2003544707 description "Includes bibliographical references and index.".
- 2003544707 extent "xliv, 334 p. :".
- 2003544707 identifier "0819447803".
- 2003544707 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4980.".
- 2003544707 isPartOf "SPIE proceedings series, 0277-786X ; v. 4980".
- 2003544707 issued "2003".
- 2003544707 issued "c2003.".
- 2003544707 language "eng".
- 2003544707 publisher "Bellingham, Wash., USA : SPIE,".
- 2003544707 subject "621.381 22".
- 2003544707 subject "Microelectromechanical systems Reliability Congresses.".
- 2003544707 subject "Microelectromechanical systems Testing Congresses.".
- 2003544707 subject "TK7875 .R439 2003".
- 2003544707 title "Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA / Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).".
- 2003544707 type "text".