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- 2004024395 contributor B9834304.
- 2004024395 created "c2005.".
- 2004024395 date "2005".
- 2004024395 date "c2005.".
- 2004024395 dateCopyrighted "c2005.".
- 2004024395 description "Includes bibliographical references and index.".
- 2004024395 extent "xxi, 614 p. :".
- 2004024395 identifier "0819450219".
- 2004024395 identifier 2004024395.html.
- 2004024395 issued "2005".
- 2004024395 issued "c2005.".
- 2004024395 language "eng".
- 2004024395 publisher "Bellingham, WA : SPIE Press,".
- 2004024395 subject "621.381 22".
- 2004024395 subject "Microelectromechanical systems.".
- 2004024395 subject "Microfabrication.".
- 2004024395 subject "Optoelectronic devices.".
- 2004024395 subject "TK7875 .M56 2005".
- 2004024395 title "MOEMS : micro-opto-electro-mechanical systems / Manouchehr E. Motamedi, editor.".
- 2004024395 type "text".