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- 2005049594 contributor B10160695.
- 2005049594 created "c2005.".
- 2005049594 date "2005".
- 2005049594 date "c2005.".
- 2005049594 dateCopyrighted "c2005.".
- 2005049594 description "Includes bibliographical references (p. 203-213) and index.".
- 2005049594 extent "xiii, 220 p. :".
- 2005049594 identifier "0071455566".
- 2005049594 identifier 2005049594-b.html.
- 2005049594 identifier 2005049594-d.html.
- 2005049594 identifier 2005049594-t.html.
- 2005049594 identifier 2005049594.html.
- 2005049594 isPartOf "McGraw-Hill nanoscience and technology series".
- 2005049594 issued "2005".
- 2005049594 issued "c2005.".
- 2005049594 language "eng".
- 2005049594 publisher "New York : McGraw-Hill,".
- 2005049594 subject "621.381/046 22".
- 2005049594 subject "Microelectromechanical systems.".
- 2005049594 subject "Microelectronic packaging.".
- 2005049594 subject "Optoelectronic devices.".
- 2005049594 subject "TK7870.15 .G55 2005".
- 2005049594 title "MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo.".
- 2005049594 type "text".