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- 2005283128 contributor B10186422.
- 2005283128 contributor B10186423.
- 2005283128 created "c2005.".
- 2005283128 date "2005".
- 2005283128 date "c2005.".
- 2005283128 dateCopyrighted "c2005.".
- 2005283128 description "Includes bibliographical references and author index.".
- 2005283128 extent "3 v. :".
- 2005283128 identifier "0819457345 (3 v. set)".
- 2005283128 isPartOf "Proceedings of SPIE, 0277-786X ; v. 5754".
- 2005283128 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5754.".
- 2005283128 issued "2005".
- 2005283128 issued "c2005.".
- 2005283128 language "eng".
- 2005283128 publisher "Bellingham, Wash. : SPIE,".
- 2005283128 subject "621.3815/31 22".
- 2005283128 subject "Integrated circuits Masks Congresses.".
- 2005283128 subject "Manufacturing processes Congresses.".
- 2005283128 subject "Microlithography Congresses.".
- 2005283128 subject "TK7835 .O664 2005".
- 2005283128 subject "X-ray lithography Congresses.".
- 2005283128 title "Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA / Bruce W. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH.".
- 2005283128 type "text".