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- 2005298417 alternative "MOEMS technologies and applications".
- 2005298417 contributor B10192371.
- 2005298417 contributor B10192372.
- 2005298417 created "c2004.".
- 2005298417 date "2004".
- 2005298417 date "c2004.".
- 2005298417 dateCopyrighted "c2004.".
- 2005298417 description "Includes bibliographical references and author index.".
- 2005298417 extent "xi, 364 p. :".
- 2005298417 identifier "0819455962".
- 2005298417 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5641.".
- 2005298417 isPartOf "SPIE proceedings series ; v. 5641".
- 2005298417 issued "2004".
- 2005298417 issued "c2004.".
- 2005298417 language "eng".
- 2005298417 publisher "Bellingham, Wash. : SPIE,".
- 2005298417 subject "621.381 22".
- 2005298417 subject "Microelectromechanical systems Congresses.".
- 2005298417 subject "Optoelectronic devices Congresses.".
- 2005298417 subject "TK7875 .M4539 2004".
- 2005298417 title "MEMS/MOEMS technologies and applications II : 10-12 November, 2004, Beijing, China / Zhichun Ma, Guofan Jin, Xuyuan Chen, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.] ; published by SPIE--the International Society for Optical Engineering.".
- 2005298417 title "MOEMS technologies and applications".
- 2005298417 type "text".