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- 2006365086 contributor B10556787.
- 2006365086 created "c2005.".
- 2006365086 date "2005".
- 2006365086 date "c2005.".
- 2006365086 dateCopyrighted "c2005.".
- 2006365086 description "Includes bibliographical references and index.".
- 2006365086 extent "xiv, 409 p. :".
- 2006365086 identifier "0849334470 (CRC)".
- 2006365086 identifier "1845690907 (e-book)".
- 2006365086 identifier "1855739313 (Woodhead)".
- 2006365086 identifier "9781855739314".
- 2006365086 identifier "978845690908 (e-book)".
- 2006365086 identifier 2006365086-d.html.
- 2006365086 identifier 2006365086.html.
- 2006365086 isPartOf "Woodhead Publishing in materials".
- 2006365086 issued "2005".
- 2006365086 issued "c2005.".
- 2006365086 language "eng".
- 2006365086 publisher "Cambridge : Woodhead Pub. ; Boca Raton, FL : CRC Press,".
- 2006365086 subject "621.3815/31 22".
- 2006365086 subject "Nanolithography.".
- 2006365086 subject "Nanotechnology.".
- 2006365086 subject "TK7874 .N318 2005".
- 2006365086 title "Nanolithography and patterning techniques in microelectronics / edited by David G. Bucknall.".
- 2006365086 type "text".